公开(公告)号：US11119384B2

公开(公告)日：2021-09-14

申请号：US16133611

申请日：2018-09-17

Applicant: KLA-Tencor Corporation

Inventor： Rajeev Patil ,  David Ramirez ,  Yevgeniy Churin ,  William Replogle

IPC: G02F1/35 ,  H01L21/67 ,  H01S3/00

Abstract: Disclosed are methods and apparatus for hermetically sealing a nonlinear optical (NLO) crystal for use in a laser system. A mounted NLO crystal, an enclosure base, a lid, and a plurality of window components are moved into an oven. A vacuum bake process is then performed on the mounted NLO crystal, enclosure base, lid, and plurality of window components until a humidity level that is less than a predefined amount is reached. The mounted NLO crystal, enclosure base, lid, and plurality of window components are moved from the oven onto a stage of a glove box that includes a sealing tool. In the glove box, the mounted NLO crystal is hermetically sealed into the enclosure base by sealing the lid and plurality of window components into openings of the enclosure base.

公开(公告)号：US20190094653A1

公开(公告)日：2019-03-28

申请号：US16133611

申请日：2018-09-17

Applicant: KLA-Tencor Corporation

Inventor： Rajeev Patil ,  David Ramirez ,  Yevgeniy Churin ,  William Replogle

IPC: G02F1/35 ,  H01L21/67 ,  H01S3/00

Abstract: Disclosed are methods and apparatus for hermetically sealing a nonlinear optical (NLO) crystal for use in a laser system. A mounted NLO crystal, an enclosure base, a lid, and a plurality of window components are moved into an oven. A vacuum bake process is then performed on the mounted NLO crystal, enclosure base, lid, and plurality of window components until a humidity level that is less than a predefined amount is reached. The mounted NLO crystal, enclosure base, lid, and plurality of window components are moved from the oven onto a stage of a glove box that includes a sealing tool. In the glove box, the mounted NLO crystal is hermetically sealed into the enclosure base by sealing the lid and plurality of window components into openings of the enclosure base.