公开(公告)号：US09715069B2

公开(公告)日：2017-07-25

申请号：US15143148

申请日：2016-04-29

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Eui Su Lee ,  Won Hui Lee ,  Kyung Hyun Park

IPC: G02B6/12 ,  G02B6/42 ,  H01S5/026 ,  H01S5/10

CPC classification number: G02B6/4201 ,  H01L31/09 ,  H01S5/0262 ,  H01S5/1007

Abstract: Disclosed is a photo diode. The photo diode includes: at least two branched waveguides configured to receive beating signals; absorbing layers disposed in vertical directions to the waveguides, and disposed while being spaced apart from distal ends of the waveguides by a predetermined interval; and one or more intermediate layers formed based on the distal ends of the waveguides and disposed with the absorbing layers at upper end of the one or more intermediate layers.