公开(公告)号：US11519874B2

公开(公告)日：2022-12-06

申请号：US17406786

申请日：2021-08-19

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Woo Seok Yang ,  Sunghoon Hong ,  Gyu Ri Lim

IPC: G01N27/22

Abstract: A humidity sensor is provided. The humidity sensor includes a flexible substrate, a moisture absorption prevention layer covering the flexible substrate, a dielectric layer on the moisture absorption prevention layer, hydrophobic patterns on the dielectric layer, a first electrode between the moisture absorption prevention layer and the dielectric layer, and a second electrode spaced apart from the first electrode between the moisture absorption prevention layer and the dielectric layer. The first electrode has a thickness greater than that of the moisture absorption prevention layer.