公开(公告)号：US07369234B2

公开(公告)日：2008-05-06

申请号：US10995520

申请日：2004-11-24

Applicant: David Beaglehole

Inventor： David Beaglehole

IPC: G01J4/02 ,  G02F1/01

CPC classification number: G01N21/211

Abstract: The invention relates to a method of performing an optical measurement on a sample, such as an ellipticity measurement. The sample is irradiated with a polarized irradiation beam and a return beam is linearly polarized. The irradiation or return beam is modulated with a birefringence modulator, such as a photoelastic modulator, in accordance with a primary modulation signal. The return beam is directed onto a multichannel detector. Typically the detector is a slow detector, such as a CCD, having a response time greater than a period of the primary modulation signal. Detection values are generated simultaneously at each detection element and processed to determine a plurality of measurements. Various measurement techniques are described, including detector signal averaging over gated intervals; a design employing coherent modulation of the gain of an ICCD , and a modulator-coherent flash lamp design.

Abstract translation: 本发明涉及对样品进行光学测量的方法，例如椭圆度测量。 样品用偏振照射光束照射，返回光束线性偏振。 根据初级调制信号，利用双折射调制器（例如光弹性调制器）调制照射或返回光束。 返回光束被引导到多通道检测器。 通常，检测器是具有大于初级调制信号周期的响应时间的慢速检测器，例如CCD。 在每个检测元件处同时产生检测值，并进行处理以确定多个测量值。 描述了各种测量技术，包括门控间隔的检测器信号平均; 采用相干调制ICCD增益的设计，以及调制器相干的闪光灯设计。

公开(公告)号：US20050134849A1

公开(公告)日：2005-06-23

申请号：US10995520

申请日：2004-11-24

Applicant: David Beaglehole

Inventor： David Beaglehole

IPC: G01J4/00 ,  G01N21/21

CPC classification number: G01N21/211

Abstract: The invention relates to a method of performing an optical measurement on a sample, such as an ellipticity measurement. The sample is irradiated with a polarized irradiation beam and a return beam is linearly polarized. The irradiation or return beam is modulated with a birefringence modulator, such as a photoelastic modulator, in accordance with a primary modulation signal. The return beam is directed onto a multichannel detector. Typically the detector is a slow detector, such as a CCD, having a response time greater than a period of the primary modulation signal. Detection values are generated simultaneously at each detection element and processed to determine a plurality of measurements. Various measurement techniques are described, including detector signal averaging over gated intervals; a design employing coherent modulation of the gain of an ICCD , and a modulator-coherent flash lamp design.

Abstract translation: 本发明涉及对样品进行光学测量的方法，例如椭圆度测量。 样品用偏振照射光束照射，返回光束线性偏振。 根据初级调制信号，利用双折射调制器（例如光弹性调制器）调制照射或返回光束。 返回光束被引导到多通道检测器。 通常，检测器是具有大于初级调制信号周期的响应时间的慢速检测器，例如CCD。 在每个检测元件处同时产生检测值，并进行处理以确定多个测量值。 描述了各种测量技术，包括门控间隔的检测器信号平均; 采用相干调制ICCD增益的设计，以及调制器相干的闪光灯设计。