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公开(公告)号:US11239276B2
公开(公告)日:2022-02-01
申请号:US16657640
申请日:2019-10-18
Applicant: CALIFORNIA INSTITUTE OF TECHNOLOGY
Inventor: Gregory Roberts , Philip Camayd-Munoz , Conner Ballew , Andrei Faraon
IPC: H01L27/146 , H01L31/0232 , G02B27/09 , G02B5/02 , G02B27/00 , G02B27/42
Abstract: Methods to build multi-functional scattering structures while respecting tight requirements imposed by manufacturing processes are described. The described methods and devices are based on etching away wire networks embedded in 3D structures to form voids in order to perform a target function. Optimization algorithms for designing binarized devices that meet manufacturing requirements are also disclosed.
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公开(公告)号:US12216290B2
公开(公告)日:2025-02-04
申请号:US17853540
申请日:2022-06-29
Applicant: CALIFORNIA INSTITUTE OF TECHNOLOGY
Inventor: Philip Camayd-Munoz , Conner Ballew , Gregory Roberts , Andrei Faraon
IPC: G02B27/10 , G02B5/02 , H01L27/146 , H01P1/207
Abstract: Methods and devices to build and use multi-functional scattering structures. The disclosed methods and devices account for multiple target functions and can be implemented using fabrication methods based on two-photon polymerization or multi-layer lithography. Exemplary devices functioning as wave splitters are also described. Results confirming the performance and benefits of the disclosed teachings are also described.
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