公开(公告)号：US20170365443A1

公开(公告)日：2017-12-21

申请号：US15414379

申请日：2017-01-24

Applicant: Applied Materials, Inc.

Inventor： James D. CARDUCCI ,  Kenneth S. COLLINS ,  Kartik RAMASWAMY ,  Michael R. RICE ,  Richard Charles FOVELL ,  Vijay D. PARKHE

IPC: H01J37/32

CPC classification number: H01J37/32009 ,  H01J37/3244 ,  H01J37/3255 ,  H01J2237/334

Abstract: A gas distribution plate assembly for a processing chamber is provided that in one embodiment includes a body made of a metallic material, a base plate comprising a silicon infiltrated metal matrix composite coupled to the body, and a perforated faceplate comprising a silicon disk coupled to the base plate by a bond layer.