公开(公告)号：US20190352775A1

公开(公告)日：2019-11-21

申请号：US16412798

申请日：2019-05-15

Applicant: Applied Materials, Inc.

Inventor： Gang PENG ,  Halbert CHONG ,  Marcus PEREIRA ,  David W. GROECHEL

IPC: C23C16/44 ,  H01L21/67 ,  H01J37/32 ,  B08B7/02

Abstract: Embodiments described herein relate to a gas line cleaning system and a method of cleaning gas lines. The gas line cleaning system includes a connector having a first end and a second end, and a fluid system. The fluid system includes a fluid source configured to flow a fluid through a fluid conduit connected to the first end, and an ultrasonic transducer coupled to the fluid conduit configured to apply an ultrasonic energy to the fluid conduit to agitate the fluid. The ultrasonic energy creates a mechanical energy that reverberates in the fluid conduit and propagates into the fluid to remove particles that may have formed on an inside surface of a gas line connected to the second end and carry away particles inside the gas line.