公开(公告)号：US11714212B1

公开(公告)日：2023-08-01

申请号：US17472454

申请日：2021-09-10

Applicant: Apple Inc.

Inventor： Timothy M. Gustafson ,  Isamu Konishiike ,  Ligang Wang ,  Ryozo Fukuzaki ,  Andrej Halabica

IPC: G02B1/118 ,  G02B1/113 ,  C23C16/455 ,  C23C16/02 ,  C23C16/56 ,  C23C16/40

CPC classification number: G02B1/113 ,  C23C16/0272 ,  C23C16/402 ,  C23C16/403 ,  C23C16/45536 ,  C23C16/56 ,  G02B1/118

Abstract: Optical coatings for curved or non-planar substrates are disclosed. Optical coatings may include AR (antireflection) coatings or absorbing (“black” optical) coatings. The optical coatings may include a nanostructure layer formed on top of a stack of one or more materials. Both the nanostructure layer and the stack may be deposited on a curved or non-planar substrate using plasma-enhanced atomic layer deposition (PEALD) to provide conformal coating of the substrate. The nanostructure layer may include a mixture of aluminum hydroxide and aluminum oxide hydroxide that is formed by placing a PEALD-deposited aluminum oxide layer in heated deionized water for a predetermined time period. The materials in the stack may be alternated to provide tuning of the optical properties in the optical coating.