-
公开(公告)号：US20170361359A1
公开(公告)日：2017-12-21
申请号：US15690707
申请日：2017-08-30
Applicant: ASML Netherlands B.V.
Inventor： Silvia De Dea , Chunguang Xia , Gregory James Wilson , Brandon Wilson Verhoff
CPC classification number: B08B5/02 , G01F1/00 , G03F7/70925 , G03F7/70933
Abstract: A fluid is directed toward a surface of an optical element based on a first flow pattern, the surface of the optical element including debris and the fluid directed based on the first flow pattern moving at least some of the debris to a first stagnation region at the surface of the optical element; and the fluid is directed toward the optical element based on a second flow pattern, the fluid directed based on the second flow pattern moving at least some of the debris to a second stagnation region on the surface of the optical element, the second stagnation region and the first stagnation region being different locations at the surface of the optical element. Directing the fluid toward the surface of the optical element based on the second flow pattern removes at least some of the debris from the first stagnation region.
-
公开(公告)号：US20170036252A1
公开(公告)日：2017-02-09
申请号：US14937973
申请日：2015-11-11
Applicant: ASML Netherlands B.V.
Inventor： Silvia De Dea , Chunguang Xia , Gregory James Wilson , Brandon Wilson Verhoff
CPC classification number: B08B5/02 , G01F1/00 , G03F7/70925 , G03F7/70933
Abstract: A fluid is directed toward a surface of an optical element based on a first flow pattern, the surface of the optical element including debris and the fluid directed based on the first flow pattern moving at least some of the debris to a first stagnation region at the surface of the optical element; and the fluid is directed toward the optical element based on a second flow pattern, the fluid directed based on the second flow pattern moving at least some of the debris to a second stagnation region on the surface of the optical element, the second stagnation region and the first stagnation region being different locations at the surface of the optical element. Directing the fluid toward the surface of the optical element based on the second flow pattern removes at least some of the debris from the first stagnation region.
Abstract translation: 基于第一流动图案将流体引导到光学元件的表面，光学元件的表面包括碎屑，并且基于第一流动图案指向的流体将至少一些碎片移动到第一停滞区域 光学元件的表面; 并且基于第二流动图案将流体引向光学元件，基于第二流动图案指向的流体将至少一些碎片移动到光学元件的表面上的第二停滞区域，第二停滞区域和 第一停滞区域是在光学元件的表面处不同的位置。 基于第二流动模式将流体引导到光学元件的表面去除了来自第一停滞区域的至少一些碎屑。
-
公开(公告)号：US09560730B2
公开(公告)日：2017-01-31
申请号：US14022026
申请日：2013-09-09
Applicant: ASML Netherlands B.V.
Inventor： Silvia De Dea , Alexander I. Ershov , Brandon Verhoff , Gregory Wilson , Bruno M. La Fontaine
CPC classification number: H05G2/008 , G03F7/70033 , G03F7/70925 , H05G2/005
Abstract: Free radicals that combine with debris that is created by converting a target mixture to plasma that emits EUV light are received at a first opening defined by a first end of a conduit, the conduit including a material that passes the free radicals and the conduit including a sidewall that extends away from the first opening and defines at least one other opening, the at least one other positioned to release the free radicals toward an element that accumulates the debris on a surface. The free radicals in the conduit are directed toward the at least one other opening. The free radicals are passed through the at least one other opening and to the surface of the element to remove the debris from the surface of the element without removing the element from the EUV light source.
Abstract translation: 与通过将目标混合物转化为发射EUV光的等离子体产生的碎屑结合的自由基在由导管的第一端限定的第一开口处接收，该导管包括使自由基和导管通过的材料，其包括 侧壁，其远离第一开口延伸并且限定至少一个其它开口，所述至少一个其它开口定位成将自由基朝向将碎屑积聚在表面上的元件释放。 导管中的自由基指向至少另一个开口。 自由基通过至少一个其它开口并且到达元件的表面以从元件的表面去除碎屑而不从EUV光源移除元件。
-
4.发明申请公开(公告)号：US20160274466A1
公开(公告)日：2016-09-22
申请号：US15168431
申请日：2016-05-31
Applicant: ASML Netherlands B.V.
Inventor： Silvia De Dea , Georgiy O. Vaschenko , Peter Baumgart , Norbert Bowering
CPC classification number: G03F7/70033 , C23C14/185 , H05G2/003 , H05G2/006 , H05G2/008
Abstract: A target material supply apparatus for an extreme ultraviolet (EUV) light source includes a tube that includes a first end, a second end, and a sidewall defined between the first and second ends. At least a portion of an outer surface of the tube includes an electrically insulating material, the first end receives a pressurized target material, and the second end defines an orifice through which the pressurized target material passes to produce a stream of target material droplets. The target material supply apparatus also includes an electrically conductive coating on the outer surface of the tube. The coating is configured to electrically connect the outer surface of the tube to ground to thereby reduce surface charge on the outer surface.
Abstract translation: 用于极紫外（EUV）光源的目标材料供应装置包括管，其包括限定在第一和第二端之间的第一端，第二端和侧壁。 管的外表面的至少一部分包括电绝缘材料，第一端容纳加压目标材料，第二端限定出加压目标材料通过的孔，以产生目标材料液滴流。 目标材料供应装置还包括在管的外表面上的导电涂层。 涂层被配置为将管的外表面电连接到地，从而减少外表面上的表面电荷。
-
公开(公告)号：US20150282287A1
公开(公告)日：2015-10-01
申请号：US14740916
申请日：2015-06-16
Applicant: ASML Netherlands B.V.
Inventor： Silvia De Dea , Alexander I. Ershov , Brandon Verhoff , Gregory Wilson , Bruno M. La Fontaine
IPC: H05G2/00
CPC classification number: G03F7/2039 , G03F7/70175 , G03F7/70925 , H05G2/005 , H05G2/008
Abstract: A system for an extreme ultraviolet (EUV) light source includes a radical transport system that includes one or more conduits, each of the one or more conduits comprising a sidewall, the sidewall comprising a linear portion and a second portion, the linear portion of the sidewall comprising a first end that defines a first opening, and the second portion of the sidewall comprising one or more openings from an interior of the conduit to an exterior of the conduit, where the second portion of at least one of the one or more conduits is positioned relative to a collector that is inside of a vacuum chamber of the EUV light source with a gap between the collector and the second portion; and a control system.
Abstract translation: 用于极紫外（EUV）光源的系统包括自由基输送系统，其包括一个或多个导管，所述一个或多个导管中的每一个包括侧壁，所述侧壁包括直线部分和第二部分，所述线性部分 侧壁包括限定第一开口的第一端，并且所述侧壁的第二部分包括从所述导管的内部到所述导管的外部的一个或多个开口，其中所述一个或多个导管中的至少一个的第二部分 相对于在集电体和第二部分之间具有间隙的EUV光源的真空室内部的集电器定位; 和控制系统。
-
Patent Agency Ranking
公开(公告)号：US09776218B2
公开(公告)日：2017-10-03
申请号：US14937973
申请日：2015-11-11
Applicant: ASML Netherlands B.V.
Inventor： Silvia De Dea , Chunguang Xia , Gregory James Wilson , Brandon Wilson Verhoff
CPC classification number: B08B5/02 , G01F1/00 , G03F7/70925 , G03F7/70933
Abstract: A fluid is directed toward a surface of an optical element based on a first flow pattern, the surface of the optical element including debris and the fluid directed based on the first flow pattern moving at least some of the debris to a first stagnation region at the surface of the optical element; and the fluid is directed toward the optical element based on a second flow pattern, the fluid directed based on the second flow pattern moving at least some of the debris to a second stagnation region on the surface of the optical element, the second stagnation region and the first stagnation region being different locations at the surface of the optical element. Directing the fluid toward the surface of the optical element based on the second flow pattern removes at least some of the debris from the first stagnation region.
-
公开(公告)号：US20150273542A1
公开(公告)日：2015-10-01
申请号：US14737590
申请日：2015-06-12
Applicant: ASML Netherlands B.V.
Inventor： Silvia De Dea , Michael Varga , Alexander I. Ershov , Robert L. Morse
CPC classification number: B08B11/02 , B08B3/02 , B23K26/0643 , B23K26/16 , G02B27/0006 , G03F7/70925
Abstract: A carrier holds an extreme ultraviolet light source collector mirror. The carrier includes a front panel having an inner surface and an outer surface opposite the inner surface, and defining a through opening that has an edge having a plurality of scallops; a back panel having an inner surface that faces the front panel and an outer surface opposite the inner surface; and a plurality of posts that are configured to connect the back panel to the front panel and to sandwich a flat rim around the circular boundary of the collector mirror between the inner surface of one of the panels and flanges of the posts. The scallops are positioned around a circumference of the edge and being separated by arcs, where the arcs define a circle that has a diameter that is less than a diameter of the circular boundary of the reflective surface of the collector mirror.
Abstract translation: 载体保持极紫外光源收集镜。 载体包括具有内表面和与内表面相对的外表面的前面板，并且限定具有多个扇形边缘的通孔; 背面板，其具有面向所述前面板的内表面和与所述内表面相对的外表面; 以及多个柱，其被构造成将所述后面板连接到所述前面板，并且在所述面板的内表面和所述柱的凸缘之间夹住围绕所述收集镜的圆形边界的平坦边缘。 扇形围绕边缘的圆周定位并且被圆弧分隔开，其中圆弧限定圆直径小于收集器反射镜的反射表面的圆形边界的直径。
-
公开(公告)号：US10232413B2
公开(公告)日：2019-03-19
申请号：US15690707
申请日：2017-08-30
Applicant: ASML Netherlands B.V.
Inventor： Silvia De Dea , Chunguang Xia , Gregory James Wilson , Brandon Wilson Verhoff
Abstract: A fluid is directed toward a surface of an optical element based on a first flow pattern, the surface of the optical element including debris and the fluid directed based on the first flow pattern moving at least some of the debris to a first stagnation region at the surface of the optical element; and the fluid is directed toward the optical element based on a second flow pattern, the fluid directed based on the second flow pattern moving at least some of the debris to a second stagnation region on the surface of the optical element, the second stagnation region and the first stagnation region being different locations at the surface of the optical element. Directing the fluid toward the surface of the optical element based on the second flow pattern removes at least some of the debris from the first stagnation region.
-
公开(公告)号：US09844804B2
公开(公告)日：2017-12-19
申请号：US14737590
申请日：2015-06-12
Applicant: ASML Netherlands B.V.
Inventor： Silvia De Dea , Michael Varga , Alexander I. Ershov , Robert L. Morse
CPC classification number: B08B11/02 , B08B3/02 , B23K26/0643 , B23K26/16 , G02B27/0006 , G03F7/70925
Abstract: A carrier holds an extreme ultraviolet light source collector mirror. The carrier includes a front panel having an inner surface and an outer surface opposite the inner surface, and defining a through opening that has an edge having a plurality of scallops; a back panel having an inner surface that faces the front panel and an outer surface opposite the inner surface; and a plurality of posts that are configured to connect the back panel to the front panel and to sandwich a flat rim around the circular boundary of the collector mirror between the inner surface of one of the panels and flanges of the posts. The scallops are positioned around a circumference of the edge and being separated by arcs, where the arcs define a circle that has a diameter that is less than a diameter of the circular boundary of the reflective surface of the collector mirror.
-
公开(公告)号：US09632418B2
公开(公告)日：2017-04-25
申请号：US15168431
申请日：2016-05-31
Applicant: ASML Netherlands B.V.
Inventor： Silvia De Dea , Georgiy O. Vaschenko , Peter Baumgart , Norbert Bowering
CPC classification number: G03F7/70033 , C23C14/185 , H05G2/003 , H05G2/006 , H05G2/008
Abstract: A target material supply apparatus for an extreme ultraviolet (EUV) light source includes a tube that includes a first end, a second end, and a sidewall defined between the first and second ends. At least a portion of an outer surface of the tube includes an electrically insulating material, the first end receives a pressurized target material, and the second end defines an orifice through which the pressurized target material passes to produce a stream of target material droplets. The target material supply apparatus also includes an electrically conductive coating on the outer surface of the tube. The coating is configured to electrically connect the outer surface of the tube to ground to thereby reduce surface charge on the outer surface.
-
-
-
-
-
-
-
-
-
Search Results
12
records
(took 0.014 seconds)
