公开(公告)号：US10127336B2

公开(公告)日：2018-11-13

申请号：US14890867

申请日：2014-05-05

Applicant: ASML Netherlands B.V.

Inventor： Sander Frederik Wuister ,  Tamara Druzhinina ,  Jan Van Male ,  Joanne Klein-Wolterink ,  Davide Ambesi

IPC: G06F17/50 ,  G06F7/00 ,  G03F7/00

Abstract: A method of determining an uncertainty in the position of a domain within a self-assembly block copolymer (BCP) feature. The method includes simulating a BCP feature, calculating a minimum energy position of a first domain within the simulated BCP feature, simulating the application of a potential that causes the position of the first domain to be displaced from the minimum energy position, simulating release of the potential back toward the minimum energy, recording a plurality of energies of the BCP feature during the release and recording at each of the plurality of energies a displacement of the first domain from the minimum energy position, calculating, from the recorded energies and recorded displacements, a probability distribution indicating a probability of the first domain being displaced from the minimum energy position, and, from the probability distribution, calculating an uncertainty in the position of the first domain within the BCP feature.

公开(公告)号：US10884333B2

公开(公告)日：2021-01-05

申请号：US14909057

申请日：2014-07-09

Applicant: ASML Netherlands B.V.

Inventor： Sander Frederik Wuister ,  Bart Laenens ,  Davide Ambesi

IPC: G03F1/70 ,  G03F7/00 ,  B81C1/00 ,  G06F30/392 ,  G06F30/398

Abstract: A method of design or verification for a self-assemblable block copolymer feature, the block copolymer feature including a first domain having a first polymer type and a second domain having a second polymer type, the method including, based on the length of the second polymer type or on an uncertainty in position of the first domain within the block copolymer feature calculated based on the length of the second polymer type, adjusting a parameter of the self-assembly process of a block copolymer feature or verifying a placement of a block copolymer feature.