公开(公告)号：USRE46099E1

公开(公告)日：2016-08-09

申请号：US14663333

申请日：2015-03-19

Applicant: ASML Holding N.V.

Inventor： Pradeep K. Govil ,  Andrew Guzman

IPC: G02B26/00 ,  G02B5/08 ,  G02B26/08

CPC classification number: G02B26/0825 ,  G02B26/0841 ,  Y10S359/90

Abstract: A deformable optical device includes a reflection device having a first reflecting surface and a second surface, an actuator (e.g., an integrated circuit piezoelectric actuator) having a support device and moveable extensions extending therefrom, which are coupled to the second surface, and electrodes coupled to corresponding ones of the extensions. Wavefront aberrations are detected and used to generate a control signal. The extensions are moved based on the control signal. The movement deforms the reflecting surface to correct the aberrations in the wavefront.