公开(公告)号：US20040156539A1

公开(公告)日：2004-08-12

申请号：US10361953

申请日：2003-02-10

Applicant: ASM Assembly Automation Ltd

Inventor： David Anders Jansson ,  Wing Hong Leung ,  Xu Qiong Chen

IPC: G06K009/00

CPC classification number: G06T7/001 ,  G01N21/8903 ,  G01N21/95684 ,  G06T7/0002 ,  G06T7/97 ,  G06T2207/30148 ,  H01L2924/0002 ,  H01L2924/00

Abstract: The invention provides an apparatus and method for inspecting an array of electronic components. The apparatus comprises a scanning device adapted to capture images of at least one surface of each of the respective components, whereby to inspect said surface. The scanning device may be a line scanning device.

Abstract translation: 本发明提供了一种用于检查电子部件阵列的装置和方法。 该装置包括适于捕获每个相应部件的至少一个表面的图像的扫描装置，从而检查所述表面。 扫描装置可以是行扫描装置。