公开(公告)号：US07967945B2

公开(公告)日：2011-06-28

申请号：US12156148

申请日：2008-05-30

申请人： Yuri Glukhoy ,  Tatiana Kerzhner ,  Anna Ryaboy

发明人： Yuri Glukhoy ,  Tatiana Kerzhner ,  Anna Ryaboy

IPC分类号： H01L21/306 ,  C23C16/00

CPC分类号： C23C16/045 ,  C23C16/402 ,  C23C16/509 ,  H01J37/321

摘要： An antenna assembly for forming a barrier coating on the inner surface of a tube by means of a sealed annular chemical-plasma-reaction chamber defined by the inner wall of the tube, two spaced elements slidingly and sealingly moveable inside the tube, and a quartz tube that interconnects the cylindrical elements. The coating is formed by a PE CVD process generated inside the chamber by a transversal RF antenna unit which creates a plasma column that participates in rotation simultaneously with linear motion thus providing uniform coating of the inner surface of the tube. The method of the invention consists of depositing a layer of silicon dioxide onto the inner surface of a plastic tube by means of the aforementioned antenna assembly. The plasma column is rotated by the RF magnetic field which is rotated by using two RF generators of different frequencies that energize two groups of specifically interconnected coils.

摘要翻译： 一种用于通过由管的内壁限定的密封环形化学等离子体反应室在管的内表面上形成阻挡涂层的天线组件，两个间隔开的元件在管内滑动并密封地移动， 管连接圆柱形元件。 涂层由通过横向RF天线单元在腔室内产生的PE CVD工艺形成，其产生与线性运动同时参与旋转的等离子体柱，从而提供管的内表面的均匀涂覆。 本发明的方法包括通过上述天线组件将一层二氧化硅沉积在塑料管的内表面上。 等离子体柱被RF磁场旋转，RF磁场通过使用两个不同频率的RF发生器旋转，该RF发生器激励两组特别互连的线圈。

公开(公告)号：US08062470B2

公开(公告)日：2011-11-22

申请号：US12152064

申请日：2008-05-12

申请人： Yuri Glukhoy ,  Tatiana Kerzhner ,  Anna Ryaboy

发明人： Yuri Glukhoy ,  Tatiana Kerzhner ,  Anna Ryaboy

IPC分类号： C23C16/00 ,  H01L21/306

CPC分类号： C23C16/458 ,  C23C16/045 ,  C23C16/509 ,  C23C16/54 ,  H01J37/321 ,  H01J37/32779 ,  H01J2237/3323

摘要： A method and an apparatus are proposed for simultaneously coating the inner walls of a plurality of hollow containers, such as bottles, with fluid-impermeable barrier layers applied by a PECVD method with the use of transversal antennas capable of creating plasma having density increased in the vicinity of the inner walls of the containers. The barrier-layer application period is divided into a coating period and a noncoating cooling period, with RF energy constantly maintained under working conditions with shunting thereof from the coating station to the dummy loads during noncoating periods used for cooling the plastic containers. The apparatus comprises a vacuum chamber with a conveyor that transports the containers in a preoriented state for interaction with a plurality of aligning elements that can be inserted into the container openings for subsequent fixation at equal distances in positions aligned with the antennas that can be inserted into the containers for generation of the coating-applying plasma.

摘要翻译： 提出了一种方法和装置，用于同时涂覆多个中空容器（例如瓶）的内壁，其中使用通过PECVD方法施加的流体不可渗透的阻挡层，其中使用横向天线能够产生密度在 容器内壁附近。 阻挡层施加期间被分为涂覆周期和非涂层冷却期间，在用于冷却塑料容器的非涂覆期间，RF能量在工作条件下始终保持在工作状态，并将其从涂布站分流到虚拟负载。 该设备包括具有输送机的真空室，该输送机将容器以预定向状态传送，以便与可以插入容器开口的多个对准元件相互作用，以便随后在与可插入的天线对准的位置处等距离地固定 用于产生涂敷等离子体的容器。

公开(公告)号：US10730239B1

公开(公告)日：2020-08-04

申请号：US16679253

申请日：2019-11-10

申请人： Yuri Glukhoy ,  Tatiana Kerzhner ,  Anna Ryaboy ,  Joshua Kerzhner ,  Michael Ryaboy ,  Andrew Kerzhner ,  Kevin Kerzhner

发明人： Yuri Glukhoy ,  Tatiana Kerzhner ,  Anna Ryaboy ,  Joshua Kerzhner ,  Michael Ryaboy ,  Andrew Kerzhner ,  Kevin Kerzhner

IPC分类号： B33Y10/00 ,  B29C64/209 ,  B29C64/159 ,  B29C64/264 ,  B29C64/25 ,  B29C64/245 ,  B29C64/241 ,  B33Y30/00

摘要： A 3D printer apparatus for printing a refractory materials on the surfaces of workpieces in accordance with a given program is disclosed. The apparatus contains a first generator for generating a first atmospheric ICP beam, a second generator for generating a second atmospheric ICP beam, and a bouncing tube between the generators for breaking clusters of precursor nanoparticles into elementary charged nanoparticles that penetrate in a premelted state into a plasma discharge formed in the second generator under the inductive coupling with a saddle antenna, which encompasses the second generator. The outlet nozzle of the second generator emits the second beam onto an extractor plate that is a part of a plasma gun, which converts the second beam into a finely controlled focusing beam capable of printing a material even on the inner surfaces of deep small diameter gas holes of showerheads.

公开(公告)号：US20090297730A1

公开(公告)日：2009-12-03

申请号：US12156148

申请日：2008-05-30

申请人： Yuri Glukhoy ,  Tatiana Kerzhner ,  Anna Ryaboy

发明人： Yuri Glukhoy ,  Tatiana Kerzhner ,  Anna Ryaboy

IPC分类号： C23C16/505

CPC分类号： C23C16/045 ,  C23C16/402 ,  C23C16/509 ,  H01J37/321

摘要： An antenna assembly for forming a barrier coating on the inner surface of a tube by means of a sealed annular chemical-plasma-reaction chamber defined by the inner wall of the tube, two spaced elements slidingly and sealingly moveable inside the tube, and a quartz tube that interconnects the cylindrical elements. The coating is formed by a PE CVD process generated inside the chamber by a transversal RF antenna unit which creates a plasma column that participates in rotation simultaneously with linear motion thus providing uniform coating of the inner surface of the tube. The method of the invention consists of depositing a layer of silicon dioxide onto the inner surface of a plastic tube by means of the aforementioned antenna assembly. The plasma column is rotated by the RF magnetic field which is rotated by using two RF generators of different frequencies that energize two groups of specifically interconnected coils.

摘要翻译： 一种用于通过由管的内壁限定的密封环形化学等离子体反应室在管的内表面上形成阻挡涂层的天线组件，两个间隔开的元件在管内滑动并密封地移动， 管连接圆柱形元件。 涂层由通过横向RF天线单元在腔室内产生的PE CVD工艺形成，其产生与线性运动同时参与旋转的等离子体柱，从而提供管的内表面的均匀涂覆。 本发明的方法包括通过上述天线组件将一层二氧化硅沉积在塑料管的内表面上。 等离子体柱被RF磁场旋转，RF磁场通过使用两个不同频率的RF发生器旋转，该RF发生器激励两组特别互连的线圈。

公开(公告)号：US20090284421A1

公开(公告)日：2009-11-19

申请号：US12152789

申请日：2008-05-16

申请人： Yuri Glukhoy ,  Tatiana Kerzhner ,  Anna Ryaboy

发明人： Yuri Glukhoy ,  Tatiana Kerzhner ,  Anna Ryaboy

IPC分类号： H01Q1/26

CPC分类号： H01Q1/26 ,  H01Q7/00

摘要： An antenna assembly that consists of a holder which supports a transversal RF antenna with a plurality of multiturn coils connected in series or in parallel and intended for generation of an inductively coupled plasma discharge inside a container with a high plasma density in vicinity of the container's inner walls. The aforementioned discharge is used for inducing in the container a plasma chemical reaction between oxygen and organosilane with resulting deposition of the reaction product in the form of silicon dioxide onto the inner walls of the container for forming a fluid-impermeable barrier layer. A specific feature of the antenna is that it generates a magnetic field transversal to the longitudinal axis of the antenna, i.e., normal to the container's walls, where a maximal electric field, maximal plasma density and, correspondingly, maximal rate of deposition of silicon dioxide on the wall are provided.

摘要翻译： 一种天线组件，其由支撑横向RF天线的支架构成，所述横向RF天线具有串联或并联连接的多个多圈线圈，并且用于在容器内部具有高等离子体密度的容器内产生电感耦合等离子体放电 墙壁 上述放电用于在容器中诱导氧和有机硅烷之间的等离子体化学反应，从而将二氧化硅形式的反应产物沉积到容器的内壁上，以形成不透液体的阻隔层。 天线的一个特点是它产生横向天线纵向轴线的磁场，即垂直于容器壁的最大电场，最大等离子体密度以及相应地最大二氧化硅沉积速率 在墙上提供。

公开(公告)号：US20090280268A1

公开(公告)日：2009-11-12

申请号：US12152064

申请日：2008-05-12

申请人： Yuri Glukhoy ,  Tatiana Kerzhner ,  Anna Ryaboy

发明人： Yuri Glukhoy ,  Tatiana Kerzhner ,  Anna Ryaboy

IPC分类号： C23C16/505 ,  C23C16/22

CPC分类号： C23C16/458 ,  C23C16/045 ,  C23C16/509 ,  C23C16/54 ,  H01J37/321 ,  H01J37/32779 ,  H01J2237/3323

摘要： A method and an apparatus are proposed for simultaneously coating the inner walls of a plurality of hollow containers, such as bottles, with fluid-impermeable barrier layers applied by a PECVD method with the use of transversal antennas capable of creating plasma having density increased in the vicinity of the inner walls of the containers. The barrier-layer application period is divided into a coating period and a noncoating cooling period, with RF energy constantly maintained under working conditions with shunting thereof from the coating station to the dummy loads during noncoating periods used for cooling the plastic containers. The apparatus comprises a vacuum chamber with a conveyor that transports the containers in a preoriented state for interaction with a plurality of aligning elements that can be inserted into the container openings for subsequent fixation at equal distances in positions aligned with the antennas that can be inserted into the containers for generation of the coating-applying plasma.

摘要翻译： 提出了一种方法和装置，用于同时涂覆多个中空容器（例如瓶）的内壁，其中使用通过PECVD方法施加的流体不可渗透的阻挡层，其中使用横向天线能够产生密度在 容器内壁附近。 阻挡层施加期间被分为涂覆周期和非涂层冷却期间，在用于冷却塑料容器的非涂覆期间，RF能量在工作条件下始终保持在工作状态，并将其从涂布站分流到虚拟负载。 该设备包括具有输送机的真空室，该输送机将容器以预定向状态传送，以便与可以插入容器开口的多个对准元件相互作用，以便随后在与可插入的天线对准的位置处等距离地固定 用于产生涂敷等离子体的容器。