Compliant probes and test methodology for fine pitch wafer level devices and interconnects
    1.
    发明申请
    Compliant probes and test methodology for fine pitch wafer level devices and interconnects 审中-公开
    适用于细间距晶圆级器件和互连的探头和测试方法

    公开(公告)号:US20070040565A1

    公开(公告)日:2007-02-22

    申请号:US11207336

    申请日:2005-08-19

    CPC classification number: G01R31/2831 G01R31/2889 H01L2224/16 Y10T29/49004

    Abstract: A compliant interposer sheet probe card and a method for testing a wafer or a wafer level package using the probe card are described. Test electronic circuits are connected on one side of a multi-layer substrate. A top side of a compliant interposer sheet is connected to an opposite side of the multi-layer substrate. A wafer or a wafer level package to be tested is contacted with pins on a bottom side of the compliant interposer sheet whereby the wafer or wafer level package can be tested.

    Abstract translation: 描述了兼容插入片材探针卡和用于使用探针卡测试晶片或晶片级封装的方法。 测试电子电路连接在多层基板的一侧。 柔性插入片的顶侧连接到多层基板的相对侧。 要测试的晶片或晶片级封装与柔性插入片的底侧上的引脚接触,由此可以测试晶片或晶片级封装。

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