Reissue Patent
- Patent Title: 300 mm microenvironment pod with door on side
- Patent Title (中): 300 mm微环境荚,侧面有门
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Application No.: US09943098Application Date: 2001-08-30
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Publication No.: USRE38221E1Publication Date: 2003-08-19
- Inventor: Barry Gregerson , Gary Gallagher , Brian Wiseman
- Applicant: Barry Gregerson , Gary Gallagher , Brian Wiseman
- Main IPC: B65D8590
- IPC: B65D8590

Abstract:
A container for creating a microenvironment is disclosed. The container includes a shell, a door and a plurality of supports having a unique design which are used to securely retain items, such as silicon wafers, in a spaced apart parallel relationship. The supports are removable. An electrical path is provided to ground the supports. Kinematic coupling structures are also provided for positioning the container on a surface so as to, for example, properly align the door with the port of a wafer processing tool.
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