- 专利标题: Enhanced MEMS vibrating device
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申请号: US14703060申请日: 2015-05-04
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公开(公告)号: US09998088B2公开(公告)日: 2018-06-12
- 发明人: Kushal Bhattacharjee , Sergei Zhgoon
- 申请人: RF Micro Devices, Inc.
- 申请人地址: US NC Greensboro
- 专利权人: Qorvo US, Inc.
- 当前专利权人: Qorvo US, Inc.
- 当前专利权人地址: US NC Greensboro
- 代理机构: Withrow & Terranova, P.L.L.C.
- 主分类号: H03H9/25
- IPC分类号: H03H9/25 ; H01L41/09 ; H03H9/02 ; H03H9/17 ; H03H9/15 ; H03H9/24
摘要:
A MEMS vibrating device includes a substrate, at least one anchor on a surface of the substrate, and a vibrating body suspended over the substrate by the at least one anchor. The vibrating body includes a first piezoelectric thin-film layer, a second piezoelectric thin-film layer over the first piezoelectric thin-film layer, and an inter-digital transducer embedded between the first piezoelectric thin-film layer and the second piezoelectric thin-film layer. Embedding the inter-digital transducer between the first piezoelectric thin-film layer and the second piezoelectric thin-film layer may result in enhanced vibrational characteristics of the MEMS vibrating device, thereby increasing the performance thereof.
公开/授权文献
- US20150318838A1 ENHANCED MEMS VIBRATING DEVICE 公开/授权日:2015-11-05
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