- 专利标题： Image sensor with reduced spectral and optical crosstalk and method for making the image sensor
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申请号： US15489265申请日： 2017-04-17
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公开(公告)号： US09985119B2公开(公告)日： 2018-05-29
- 发明人: Axel Crocherie , Michel Marty , Jean-Luc Huguenin , Sébastien Jouan
- 申请人： STMicroelectronics S.A. , STMicroelectronics (Crolles 2) SAS
- 申请人地址： FR Montrouge FR Crolles
- 专利权人： STMICROELECTRONICS S.A.,STMICROELECTRONICS (Crolles 2) SAS
- 当前专利权人： STMICROELECTRONICS S.A.,STMICROELECTRONICS (Crolles 2) SAS
- 当前专利权人地址： FR Montrouge FR Crolles
- 代理机构： Slater Matsil, LLP
- 优先权： FR1557884 20150824
- 主分类号： H01L21/00
- IPC分类号： H01L21/00 ; H01L31/113 ; H01L29/66 ; H01L27/146
摘要：
An integrated image sensor may include adjacent pixels, with each pixel including an active semiconductor region including a photodiode, an antireflection layer disposed above the photodiode, a dielectric region disposed above the antireflection layer, an optical filter disposed above the dielectric region, and a diffraction grating disposed in the antireflection layer. The diffraction grating includes an array of pads.
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