- 专利标题: Surface treatment method and surface treatment device
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申请号: US14955791申请日: 2015-12-01
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公开(公告)号: US09982359B2公开(公告)日: 2018-05-29
- 发明人: Yuki Sato , Motoki Hiraoka , Hiroshi Yanagimoto
- 申请人: TOYOTA JIDOSHA KABUSHIKI KAISHA
- 申请人地址: JP Toyota-shi, Aichi-ken
- 专利权人: TOYOTA JIDOSHA KABUSHIKI KAISHA
- 当前专利权人: TOYOTA JIDOSHA KABUSHIKI KAISHA
- 当前专利权人地址: JP Toyota-shi, Aichi-ken
- 代理机构: Sughrue Mion, PLLC
- 优先权: JP2014-245035 20141203
- 主分类号: C25F3/14
- IPC分类号: C25F3/14 ; C25D5/02 ; C25D17/00 ; C25F7/00
摘要:
A surface treatment method includes: roughening a surface region of a substrate corresponding to a through hole provided to a masking plate by supplying a solvent to a solid electrolyte film from a second surface of a masking plate through the through hole, in a state where: a first surface of the solid electrolyte film is arranged directly on the surface of the substrate; and a first surface of the masking plate is arranged directly on a second surface of the solid electrolyte film, wherein the supplied solvent penetrates the solid electrolyte film, and dissolves the surface of the substrate.
公开/授权文献
- US20160160378A1 SURFACE TREATMENT METHOD AND SURFACE TREATMENT DEVICE 公开/授权日:2016-06-09
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