- 专利标题: Method for making a write head for magnetic recording
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申请号: US14974743申请日: 2015-12-18
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公开(公告)号: US09972345B1公开(公告)日: 2018-05-15
- 发明人: Wei Tian , Hauqing Yin , Lei Lu , Yong Luo , Joseph Mundenar
- 申请人: Seagate Technology LLC
- 申请人地址: US CA Cupertino
- 专利权人: SEAGATE TECHNOLOGY LLC
- 当前专利权人: SEAGATE TECHNOLOGY LLC
- 当前专利权人地址: US CA Cupertino
- 代理机构: Westman, Champlin & Koehler, P.A.
- 主分类号: G11B5/127
- IPC分类号: G11B5/127 ; G11B5/11
摘要:
A method includes depositing a layer of pole material on a substrate. The layer of pole material has a bottom surface that is adjacent to the substrate and a top surface that is opposite the bottom surface. A masking material is deposited over a portion of the top surface. Material from the pole material unprotected by the masking material is removed to form a write pole having first and second side walls. At least a portion of a trench formed by removal of the material from the layer of pole material is filled with a sacrificial material. The mask and a portion of the write pole at the top surface are removed to form a beveled trailing edge surface. The sacrificial material is then removed. Front shield gap material is deposited over the beveled trailing edge surface and over portions of the side walls.
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