- 专利标题： Method of characterizing a beam of electromagnetic radiation in ellipsometer and the like systems
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申请号： US14999748申请日： 2016-06-22
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公开(公告)号： US09952141B1公开(公告)日： 2018-04-24
- 发明人: Jeffrey S. Hale , Craig M. Herzinger , Martin M. Liphardt
- 申请人： Jeffrey S. Hale , Craig M. Herzinger , Martin M. Liphardt
- 申请人地址： US NE Lincoln
- 专利权人： J.A. WOOLLAM CO., INC.
- 当前专利权人： J.A. WOOLLAM CO., INC.
- 当前专利权人地址： US NE Lincoln
- 代理商 James D. Welch
- 主分类号： G01N21/21
- IPC分类号： G01N21/21 ; G01J4/04
摘要：
An approach to characterizing beams of electromagnetic radiation such as are applied in ellipsometer and the like systems, involving considering the beam to be comprised of a number of spatially distributed beam rays, each of which is represented mathematically as an effectively independent source.
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