- 专利标题: Cesium primary ion source for secondary ion mass spectrometer
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申请号: US15517917申请日: 2015-10-13
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公开(公告)号: US09941089B2公开(公告)日: 2018-04-10
- 发明人: Peter Williams , Karen Amanda Williams , Maitrayee Bose , John Prince
- 申请人: Arizona Board of Regents, a body corporate of the State of Arizona, acting for and on behalf of Arizona State University
- 申请人地址: US AZ Scottsdale
- 专利权人: ARIZONA BOARD OF REGENTS, A BODY CORPORATE OF THE STATE OF ARIZONA, ACTING FOR AND ON BEHALF OF ARIZONA STATE UNIVERSITY
- 当前专利权人: ARIZONA BOARD OF REGENTS, A BODY CORPORATE OF THE STATE OF ARIZONA, ACTING FOR AND ON BEHALF OF ARIZONA STATE UNIVERSITY
- 当前专利权人地址: US AZ Scottsdale
- 代理机构: Withrow & Terranova, P.L.L.C.
- 代理商 Vincent K. Gustafson
- 国际申请: PCT/US2015/055261 WO 20151013
- 国际公布: WO2016/061057 WO 20160421
- 主分类号: H01J27/02
- IPC分类号: H01J27/02 ; H03L7/26 ; H01H3/02 ; H01J49/26
摘要:
A primary ion source subassembly for use with a secondary ion mass spectrometer may include a unitary graphite ionizer tube and reservoir base. A primary ion source may include a capillary insert defining an ionizer aperture. An ionizer aperture may be centrally arranged in an outwardly protruding conical or frustoconical surface, and may be overlaid with a refractory metal coating or sheath. Parameters including ionizer surface shape, ionizer materials, ionizer temperature, and beam stop plate orifice geometry may be manipulated to eliminate ghost images. A graphite tube gasket with a dual tapered surface may promote sealing of a source material cavity.
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