- 专利标题: Optomechanical device with mechanical elements and optical filters for actuating and/or detecting the movement of the elements
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申请号: US15031198申请日: 2014-10-21
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公开(公告)号: US09891382B2公开(公告)日: 2018-02-13
- 发明人: Laurent Duraffourg , Sebastien Hentz , Mickael Lee Roukes
- 申请人: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES , CALIFORNIA INSTITUTE OF TECHNOLOGY
- 申请人地址: FR Paris US CA Pasadena
- 专利权人: Commissariat à l'énergie atomique et aux énergies alternatives,California Institute of Technology
- 当前专利权人: Commissariat à l'énergie atomique et aux énergies alternatives,California Institute of Technology
- 当前专利权人地址: FR Paris US CA Pasadena
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权: WOPCT/IB2013/003158 20131022
- 国际申请: PCT/EP2014/072483 WO 20141021
- 国际公布: WO2015/059109 WO 20150430
- 主分类号: G02B6/26
- IPC分类号: G02B6/26 ; G02B6/12 ; G01D5/353 ; G02B6/35 ; G01G3/16 ; G02B6/122 ; G01H9/00 ; G01D5/26 ; G02B6/293 ; G01N15/10
摘要:
An optomechanical device with mechanical elements and optical filters for actuating and/or detecting movement of the elements, including a support, and on the support: an array of mechanical elements anchored to the support and configured to move with respect thereto, and an actuating and/or detection device actuating the elements and/or detecting movement of the elements or frequency variations of the movement. The actuating and/or detection device includes an array of optical filters. Each filter resonates at a particular wavelength and is coupled to one of the elements. The actuating and/or detecting device is positioned in vicinity of all or some of the elements, between the elements and the support. The optical filters are fixed with respect to the support and the mechanical elements and the optical filters are superimposed.
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