- 专利标题： Structure, method for manufacturing the same, and image pickup apparatus including the structure
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申请号： US14235002申请日： 2012-07-11
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公开(公告)号： US09891327B2公开(公告)日： 2018-02-13
- 发明人: Takayuki Teshima , Yutaka Setomoto
- 申请人： Takayuki Teshima , Yutaka Setomoto
- 申请人地址： JP Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JP Tokyo
- 代理机构： Canon USA, Inc. I.P. Division
- 优先权： JP2011-166966 20110729; JP2012-107876 20120509
- 国际申请： PCT/JP2012/004476 WO 20120711
- 国际公布： WO2013/024562 WO 20130221
- 主分类号： G21K1/06
- IPC分类号： G21K1/06 ; G01T1/16 ; C23C28/00
摘要：
The present invention relates to a method for manufacturing a structure, including the steps of forming a recessed section in a first surface of a substrate; filling the recessed section with metal to form a metal structure; exposing the metal structure from the substrate; and applying resin onto the exposed metal structure and solidifying the resin to form a resin layer.
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