- 专利标题: Vaporizer, center rod used therein, and method for vaporizing material carried by carrier gas
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申请号: US14001910申请日: 2012-02-27
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公开(公告)号: US09885113B2公开(公告)日: 2018-02-06
- 发明人: Masaru Umeda , Masayuki Toda
- 申请人: Masaru Umeda , Masayuki Toda
- 申请人地址: JP Tokyo JP Fukushima
- 专利权人: KABUSHIKI KAISHA WATANABE SHOKO,Masayuki Toda
- 当前专利权人: KABUSHIKI KAISHA WATANABE SHOKO,Masayuki Toda
- 当前专利权人地址: JP Tokyo JP Fukushima
- 代理机构: Young & Thompson
- 优先权: JP2011-041962 20110228
- 国际申请: PCT/JP2012/054803 WO 20120227
- 国际公布: WO2012/118019 WO 20120907
- 主分类号: C23C16/448
- IPC分类号: C23C16/448
摘要:
To obtain a vaporizer in which thin film-forming raw material solutions are stably and reliably carried by a carrier gas while being reliably separated within the dispersion unit body and the plurality of thin film-forming raw material solutions are stably vaporized in the subsequent vaporization unit, a center rod used in the vaporizer, and a method for vaporizing raw materials entrained by a carrier gas. A carrier gas introduction bore is formed in the center axis direction of the dispersion unit body. A center rod is inserted in the carrier gas introduction bore. The interspace between the inner wall of the bore and the outer wall of the rod forms a gas passage. Multiple thin film-forming material supply units are situated midway of the gas passage of the dispersion unit body, supplying thin film-forming materials. The center rod has sealing members in the longitudinal direction of the center rod.
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