Invention Grant
- Patent Title: Deposition apparatus and method with cooler
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Application No.: US14963461Application Date: 2015-12-09
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Publication No.: US09884340B2Publication Date: 2018-02-06
- Inventor: Jae Hoon Hwang , Kwan Hee Lee
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si, Gyeonggi-do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si, Gyeonggi-do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2015-0101407 20150717
- Main IPC: C23C14/12
- IPC: C23C14/12 ; B05D1/00

Abstract:
A deposition apparatus and method for depositing an organic material includes an effusion cell, a guide rail, and a cooling channel. The effusion cell extends in a first direction. The guide rail is below the effusion cell and extends in a second direction. The cooling channel is below an upper surface of the guide rail and extends in the second direction.
Public/Granted literature
- US20170014861A1 DEPOSITION APPARATUS Public/Granted day:2017-01-19
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