Deposition apparatus and method with cooler
Abstract:
A deposition apparatus and method for depositing an organic material includes an effusion cell, a guide rail, and a cooling channel. The effusion cell extends in a first direction. The guide rail is below the effusion cell and extends in a second direction. The cooling channel is below an upper surface of the guide rail and extends in the second direction.
Public/Granted literature
Information query
Patent Agency Ranking
0/0