- Patent Title: Array substrate, manufacturing method thereof and display device
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Application No.: US14407707Application Date: 2013-12-05
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Publication No.: US09881942B2Publication Date: 2018-01-30
- Inventor: Shuang Sun
- Applicant: BOE Technology Group Co., Ltd.
- Applicant Address: CN Beijing
- Assignee: BOE Technology Group Co., Ltd.
- Current Assignee: BOE Technology Group Co., Ltd.
- Current Assignee Address: CN Beijing
- Agency: Banner & Witcoff, Ltd.
- Priority: CN201310452517 20130927
- International Application: PCT/CN2013/088628 WO 20131205
- International Announcement: WO2015/043069 WO 20150402
- Main IPC: H01L29/82
- IPC: H01L29/82 ; H01L27/12 ; H01L29/66 ; H01L29/786

Abstract:
A method for manufacturing an array substrate, comprising forming a pattern of a gate electrode by one pattering process; forming a gate insulating layer on a substrate provided with the pattern of the gate electrode; forming first and second patterns thereon, in which the first pattern corresponds to a pattern of a semiconductor active layer and the second pattern corresponds to a source electrode and a drain electrode; forming a pattern layer including an opening area on the substrate provided with the second pattern, in which the opening area corresponds to a gap between the source electrode and the drain electrode, the minimum width thereof being greater than the width of the gap between the source electrode and the drain electrode, and at least forming a pattern of the source electrode and the drain electrode and a pixel electrode electrically connected with the drain electrode through the opening area.
Public/Granted literature
- US20160276377A1 ARRAY SUBSTRATE, MANUFACTURING METHOD THEREOF AND DISPLAY DEVICE Public/Granted day:2016-09-22
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