- 专利标题: Magnetic shielding of MRAM package
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申请号: US15080541申请日: 2016-03-24
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公开(公告)号: US09875971B2公开(公告)日: 2018-01-23
- 发明人: Bharat Bhushan , Juan Boon Tan , Wanbing Yi
- 申请人: GLOBALFOUNDRIES Singapore Pte. Ltd.
- 申请人地址: SG Singapore
- 专利权人: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- 当前专利权人: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- 当前专利权人地址: SG Singapore
- 代理机构: Horizon IP Pte Ltd.
- 主分类号: H01L43/12
- IPC分类号: H01L43/12 ; H01L29/82 ; H01L23/552 ; H01L23/29 ; H01L21/48 ; H01L21/56 ; H01L23/00
摘要:
Magnetic random access memory (MRAM) packages with magnetic shield protections and methods of forming thereof are presented. Package contact traces are formed on the first major surface of the package substrate and package balls are formed on the second major surface of the package substrate. A die having active and inactive surfaces is provided on the first major surface of the package substrate. The die includes a magnetic storage element, such as an array of magnetic tunnel junctions (MTJs), formed in the die, die microbumps formed on the active surface. The package includes a top magnetic shield layer formed on the inactive surface of the die. The package may also include a first bottom magnetic shield in the form of magnetic shield traces disposed below the package contact traces. The package may further include a second bottom magnetic shield in the form of magnetic permeable underfill dielectric material. The package may also include a third bottom magnetic shield sandwiched between two thin package substrate layers of the package substrate.
公开/授权文献
- US20160284981A1 MAGNETIC SHIELDING OF MRAM PACKAGE 公开/授权日:2016-09-29
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