- 专利标题: Method of fabricating an electronic package
-
申请号: US14778111申请日: 2014-12-03
-
公开(公告)号: US09859249B2公开(公告)日: 2018-01-02
- 发明人: Peter Chang , Michael Mayberry
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Schwegman Lundberg & Woessner, P.A.
- 国际申请: PCT/US2014/068264 WO 20141203
- 国际公布: WO2016/089382 WO 20160609
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L23/00 ; H01L23/48 ; H01L23/58 ; H01L25/00
摘要:
Some example forms relate a method of fabricating an electronic package. The method includes attaching a source wafer that includes micro devices to a target wafer. The method further includes removing a portion of the source wafer from the target wafer to form an electronic package. The micro devices remain on the target wafer when the source wafer is removed from target wafer. The method may further include performing post processing on the electronic package that is formed after the source wafer is removed from the target wafer. In some forms of the method, some of the micro devices remain on the source wafer when the source wafer is removed from target wafer.
公开/授权文献
- US20160358885A1 METHOD OF FABRICATING AN ELECTRONIC PACKAGE 公开/授权日:2016-12-08
信息查询
IPC分类: