- 专利标题: Semiconductor package testing apparatus
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申请号: US14710747申请日: 2015-05-13
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公开(公告)号: US09846193B2公开(公告)日: 2017-12-19
- 发明人: Chak Tong Sze , Pei Wei Tsai , Cho Hin Cheuk , Si Ming Chan , Kam Sing Lee
- 申请人: ASM Technology Singapore Pte Ltd
- 申请人地址: SG Singapore
- 专利权人: ASM TECHNOLOGY SINGAPORE PTE LTD
- 当前专利权人: ASM TECHNOLOGY SINGAPORE PTE LTD
- 当前专利权人地址: SG Singapore
- 代理机构: Ostrolenk Faber LLP
- 主分类号: G01R1/04
- IPC分类号: G01R1/04 ; G01R31/28
摘要:
A semiconductor package testing apparatus comprises a package holder for holding a semiconductor package and which is positionable together with the semiconductor package at a test contactor station. There are probe pins located at the test contactor station for contacting a bottom surface of the semiconductor package and which are configured to apply an upwards force on the semiconductor package during testing of the semiconductor package. A restraining mechanism that is movable from a first position remote from the package holder and a second position over the package holder is configured to restrict lifting of the semiconductor package by the probe pins during testing of the semiconductor package when the restraining mechanism is at its second position.
公开/授权文献
- US20150331012A1 SEMICONDUCTOR PACKAGE TESTING APPARATUS 公开/授权日:2015-11-19
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