- 专利标题: Absorbing reflector for semiconductor processing chamber
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申请号: US14258410申请日: 2014-04-22
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公开(公告)号: US09832816B2公开(公告)日: 2017-11-28
- 发明人: Kin Pong Lo , Paul Brillhart , Balasubramanian Ramachandran , Satheesh Kuppurao , Daniel Redfield , Joseph M. Ranish , James Francis Mack , Kailash Kiran Patalay , Michael Olsen , Eddie Feigel , Richard Halpin , Brett Vetorino
- 申请人: Applied Materials, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: APPLIED MATERIALS, INC.
- 当前专利权人: APPLIED MATERIALS, INC.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Patterson + Sheridan LLP
- 主分类号: G02B5/08
- IPC分类号: G02B5/08 ; H05B3/00 ; H01L21/67
摘要:
Embodiments of the disclosure generally relate to a reflector for use in a thermal processing chamber. In one embodiment, the thermal processing chamber generally includes an upper dome, a lower dome opposing the upper dome, the upper dome and the lower dome defining an internal volume of the processing chamber, a substrate support disposed within the internal volume, and a reflector positioned above and proximate to the upper dome, wherein the reflector has a heat absorptive coating layer deposited on a side of the reflector facing the substrate support.
公开/授权文献
- US20140376898A1 ABSORBING REFLECTOR FOR SEMICONDUCTOR PROCESSING CHAMBER 公开/授权日:2014-12-25
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