- 专利标题: Advanced BEOL interconnect structure containing uniform air gaps
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申请号: US15268001申请日: 2016-09-16
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公开(公告)号: US09786553B1公开(公告)日: 2017-10-10
- 发明人: Chih-Chao Yang
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Scully, Scott, Murphy & Presser, P.C.
- 代理商 Louis J. Percello, Esq.
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; H01L21/768 ; H01L21/02
摘要:
A semiconductor structure including a back-end-of-the-line (BEOL) interconnect structure that contains an air gap located on each side of an interconnect metal or metal alloy structure, is provided wherein each air gap has a uniform (i.e., homogenous) shape. The uniform shape of the air gap can aide in reducing the electrical performance variation which is typically observed with prior art interconnect structures containing air gaps that have a non-uniform shape.
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