- 专利标题: Image sensor including multiple lenses and method of manufacture thereof
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申请号: US14638861申请日: 2015-03-04
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公开(公告)号: US09768224B2公开(公告)日: 2017-09-19
- 发明人: Tzu-Hsuan Hsu , Dun-Nian Yaung , Yean-Kuen Fang
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Haynes & Boone, LLP
- 主分类号: H01L27/146
- IPC分类号: H01L27/146
摘要:
A method includes fabricating an image sensing element in a substrate. A plurality of inter-metal dielectric (IMD) layers are formed over the substrate. Each IMD layer includes a metal layer and a dielectric layer. A planar top surface of a top IMD layer of the plurality of IMD layers is planarized. A portion of the top IMD layer is then removed to transform a region of the planar top surface to a curved recess. A lens is formed on the top IMD layer and in the curved recess. A color filter layer is disposed over the lens and the image sensing element.
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