- 专利标题: Load measuring apparatus and load measuring method
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申请号: US15045643申请日: 2016-02-17
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公开(公告)号: US09719869B2公开(公告)日: 2017-08-01
- 发明人: Hideaki Tanaka
- 申请人: Ebara Corporation
- 申请人地址: JP Tokyo
- 专利权人: Ebara Corporation
- 当前专利权人: Ebara Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Abelman, Frayne & Schwab
- 优先权: JP2015-033910 20150224
- 主分类号: G01L1/04
- IPC分类号: G01L1/04 ; B08B1/04 ; B08B13/00 ; H01L21/67 ; G01L5/00
摘要:
A load measuring apparatus includes a waterproof load cell having a load measuring surface, of which the length is substantially equal to a diameter of the substrate, and a base plate that supports the waterproof load cell. The load measuring apparatus is set in a substrate cleaning apparatus like a substrate, and measures a load applied from the roll cleaning tool of the substrate cleaning apparatus using the waterproof load cell.
公开/授权文献
- US20160243592A1 LOAD MEASURING APPARATUS AND LOAD MEASURING METHOD 公开/授权日:2016-08-25
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