- 专利标题: Chemical mechanical polishing slurry
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申请号: US14723488申请日: 2015-05-28
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公开(公告)号: US09718991B2公开(公告)日: 2017-08-01
- 发明人: Yi Han Yang , Wen Cheng Liu , Ming Che Ho , Ming Hui Lu , Song Yuan Chang
- 申请人: UWiZ Technology Co., Ltd.
- 申请人地址: TW Taoyuan
- 专利权人: UWIZ TECHNOLOGY CO., LTD.
- 当前专利权人: UWIZ TECHNOLOGY CO., LTD.
- 当前专利权人地址: TW Taoyuan
- 代理机构: JMB Davis Ben-David
- 优先权: TW104103884A 20150205
- 主分类号: C09G1/02
- IPC分类号: C09G1/02 ; C09K3/14
摘要:
A chemical mechanical polishing slurry for polishing a stainless steel substrate is provided, which comprises a content 10˜50 wt % of abrasive particles, a content 0.001˜2.0 wt % of a coolant, a content 0.001˜1.0 wt % of an oxidant, a content 10˜5000 ppm of a lubricity improver, and a content 10˜5000 ppm of a foam inhibitor. A particle size of the abrasive particles is in a range of 20˜500 nm. The alkaline polishing slurry according to the present invention is capable of increasing the polishing performance, surface quality, and surface passivation effect after the chemical-mechanical polishing process.
公开/授权文献
- US20160347971A1 CHEMICAL MECHANICAL POLISHING SLURRY 公开/授权日:2016-12-01
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