- 专利标题： Spray unit and apparatus for cleaning substrate having spray unit
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申请号： US14849724申请日： 2015-09-10
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公开(公告)号： US09718100B2公开(公告)日： 2017-08-01
- 发明人: Je-Yung Yum
- 申请人： SAMSUNG DISPLAY CO., LTD.
- 申请人地址： KR Yongin-Si, Gyeonggi-do
- 专利权人： Samsung Display Co., Ltd.
- 当前专利权人： Samsung Display Co., Ltd.
- 当前专利权人地址： KR Yongin-Si, Gyeonggi-do
- 代理机构： Lee & Morse, P.C.
- 优先权： KR10-2015-0007621 20150115
- 主分类号： A47L15/42
- IPC分类号： A47L15/42 ; B05B1/04 ; B05B1/18 ; B05B7/04 ; B05B7/08 ; B08B3/02 ; B08B3/04 ; H01L21/67 ; H01L51/00
摘要：
A spray unit, including a body assembly including a solution supply port, the solution port to supply cleaning solution; a flow channel in the body assembly, the flow channel connected with the solution supply port, the cleaning solution to flow through the flow channel; and a spray slit connected to the flow channel, the spray slit to spray out the cleaning solution, the flow channel including at least two chambers to hold the cleaning solution and at least two internal slits connecting the chambers to each other.
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