Invention Grant
- Patent Title: Vertical non-volatile memory device including plural word line stacks
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Application No.: US15141967Application Date: 2016-04-29
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Publication No.: US09711188B2Publication Date: 2017-07-18
- Inventor: Sung-Min Hwang , Han-Soo Kim , Won-Seok Cho , Jae-Hoon Jang , Sun-Il Shim , Jae-Hun Jeong , Ki-Hyun Kim
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Volentine & Whitt, PLLC
- Priority: KR10-2009-0067009 20090722
- Main IPC: H01L27/112
- IPC: H01L27/112 ; G11C5/06 ; H01L27/115 ; H01L27/11517

Abstract:
A vertical non-volatile memory device includes a substrate, and a first stack of word lines and a second stack of word lines extending in a first direction on the substrate and separated from each other in a second direction perpendicular to the first direction. The device further includes first array lines extending in the second direction on the first and the second stack, and connected to word lines of the first and the second stack through at least two of first via contacts in a same level. The device further include first word select lines being in a same level and extending in the first direction, and connected to each of the first array lines through at least one of second via contacts. Ends of each of the first and the second stack have a form of stairs on the substrate.
Public/Granted literature
- US20160247547A1 VERTICAL NON-VOLATILE MEMORY DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2016-08-25
Information query
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