Invention Grant
- Patent Title: Extreme ultraviolet light generation apparatus with a gas supply toward a trajectory of a target
-
Application No.: US15151025Application Date: 2016-05-10
-
Publication No.: US09661730B2Publication Date: 2017-05-23
- Inventor: Atsushi Ueda , Takayuki Yabu , Osamu Wakabayashi , Georg Soumagne , Takashi Saito
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton, Inc.
- Current Assignee: Gigaphoton, Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H05G2/00
- IPC: H05G2/00

Abstract:
An extreme ultraviolet light generation apparatus may include: a chamber; a target supply unit configured to output a target toward a predetermined region inside the chamber; a first gas supply unit configured to blow out gas in a first direction toward a trajectory of the target between the target supply unit and the predetermined region; and a focusing optical system configured to concentrate a pulse laser beam to the predetermined region.
Public/Granted literature
- US20160255707A1 EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS Public/Granted day:2016-09-01
Information query