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US09659670B2 Computer-implemented methods, computer-readable media, and systems for classifying defects detected in a memory device area on a wafer 有权

  • Patent Title: Computer-implemented methods, computer-readable media, and systems for classifying defects detected in a memory device area on a wafer
  • Application No.: US13056623
    Application Date: 2009-07-28
  • Publication No.: US09659670B2
    Publication Date: 2017-05-23
  • Inventor: SunYong Choi , YeonHo Pae , Ellis Chang
  • Applicant: SunYong Choi , YeonHo Pae , Ellis Chang
  • Applicant Address: US CA Milpitas
  • Assignee: KLA-Tencor Corp.
  • Current Assignee: KLA-Tencor Corp.
  • Current Assignee Address: US CA Milpitas
  • Agent Ann Marie Mewherter
  • International Application: PCT/US2009/051961 WO 20090728
  • International Announcement: WO2010/014609 WO 20100204
  • Main IPC: H04N19/00
  • IPC: H04N19/00 ;  G11C29/56
Computer-implemented methods, computer-readable media, and systems for classifying defects detected in a memory device area on a wafer
Abstract:
Computer-implemented methods, computer-readable media, and systems for classifying defects detected in a memory device area on a wafer are provided.
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