- 专利标题: Gas barrier film and electronic device
-
申请号: US13976300申请日: 2011-12-01
-
公开(公告)号: US09646940B2公开(公告)日: 2017-05-09
- 发明人: Takahiro Mori
- 申请人: Takahiro Mori
- 申请人地址: JP Tokyo
- 专利权人: KONICA MINOLTA, INC.
- 当前专利权人: KONICA MINOLTA, INC.
- 当前专利权人地址: JP Tokyo
- 代理机构: Lucas & Mercanti, LLP
- 优先权: JP2010-289190 20101227
- 国际申请: PCT/JP2011/077837 WO 20111201
- 国际公布: WO2012/090644 WO 20120705
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; C23C14/06 ; C23C14/56 ; C23C26/00 ; C23C16/02 ; C23C16/30 ; C23C16/34 ; C23C28/04 ; C08J7/04
摘要:
The gas barrier film including, on a base, a first gas barrier layer which is formed by a physical vapor deposition method or a chemical vapor deposition method and contains Si and N; and a second gas barrier layer which is formed by coating a solution containing a polysilazane compound, wherein the second gas barrier layer is subjected to conversion treatment by being irradiated with a vacuum ultraviolet ray; and, when the composition of each layer is represented by SiOxNy, the distribution of the composition SiOxNy of the second gas barrier layer in a thickness direction satisfies a condition specified in the following (A): (A) the second gas barrier layer includes 50 nm or more of a region of 0.25≦x≦1.1 and 0.4≦y≦0.75 in the thickness direction.
公开/授权文献
- US20130280521A1 GAS BARRIER FILM AND ELECTRONIC DEVICE 公开/授权日:2013-10-24
信息查询
IPC分类: