Invention Grant
- Patent Title: Suppression of spurious modes of vibration for resonators and related apparatus and methods
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Application No.: US14199103Application Date: 2014-03-06
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Publication No.: US09634227B1Publication Date: 2017-04-25
- Inventor: Florian Thalmayr , Jan H. Kuypers
- Applicant: Sand 9, Inc.
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: H01L41/053
- IPC: H01L41/053
Abstract:
Suppression of spurious modes of vibration for resonators and related apparatus and methods. A device may include a MEMS resonating structure, a substrate, and anchors between the MEMS resonating structure and the substrate. The MEMS resonating structure may have at least one main eigenmode of vibration and at least one spurious eigenmode of vibration. The anchors may be configured to suppress the response of the at least one spurious mode of vibration.
Information query
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