- 专利标题: MEMS having a cutout section on a concave portion between a substrate and a stationary member
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申请号: US15169368申请日: 2016-05-31
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公开(公告)号: US09611136B2公开(公告)日: 2017-04-04
- 发明人: Satoru Tanaka
- 申请人: Seiko Epson Corporation
- 申请人地址: JP
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: JP
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: JP2014-086583 20140418
- 主分类号: G01L9/00
- IPC分类号: G01L9/00 ; H01L21/00 ; H05K7/02 ; G01P15/08 ; B81B3/00 ; H01L23/00 ; B81C1/00 ; H01L23/528 ; H01L21/762 ; B81B7/00 ; G01C19/5656
摘要:
A functional element includes a substrate which is provided with a concave section; a stationary section connected to a wall section that defines the concave section of the substrate; an elastic section which extends from the stationary section and is capable of stretching and contracting in a first axis direction; a movable body connected to the elastic section; a movable electrode section which extends from the movable body. The concave section includes a cutout section which is provided on the wall section. The stationary section includes an overlap section which is spaced with the substrate, and overlaps the concave section when seen in a plan view. At least a portion of the overlap section overlaps the cutout section when seen in the plan view, and the elastic section extends from the overlap section.
公开/授权文献
- US20160272483A1 FUNCTIONAL ELEMENT HAVING A CUTOUT SECTION IN A WALL 公开/授权日:2016-09-22
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