Invention Grant
- Patent Title: Semiconductor device and method for forming openings and trenches in insulating layer by first LDA and second LDA for RDL formation
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Application No.: US14512614Application Date: 2014-10-13
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Publication No.: US09607958B2Publication Date: 2017-03-28
- Inventor: Yaojian Lin , Pandi C. Marimuthu , Kang Chen
- Applicant: STATS ChipPAC, Ltd.
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Patent Law Group: Atkins and Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L23/31 ; H01L23/29 ; H01L21/56 ; H01L23/538 ; H01L23/498

Abstract:
A semiconductor device has a semiconductor die with an encapsulant deposited over the semiconductor die. A first insulating layer having high tensile strength and elongation is formed over the semiconductor die and encapsulant. A first portion of the first insulating layer is removed by a first laser direct ablation to form a plurality of openings in the first insulating layer. The openings extend partially through the first insulating layer or into the encapsulant. A second portion of the first insulating layer is removed by a second laser direct ablation to form a plurality of trenches in the first insulating layer. A conductive layer is formed in the openings and trenches of the first insulating layer. A second insulating layer is formed over the conductive layer. A portion of the second insulating layer is removed by a third laser direct ablation. Bumps are formed over the conductive layer.
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