Invention Grant
US09590739B2 High electron mobility transistor-based terahertz wave space external modulator
有权
基于高电子迁移率晶体管的太赫兹波空间外调制器
- Patent Title: High electron mobility transistor-based terahertz wave space external modulator
- Patent Title (中): 基于高电子迁移率晶体管的太赫兹波空间外调制器
-
Application No.: US14892578Application Date: 2014-05-20
-
Publication No.: US09590739B2Publication Date: 2017-03-07
- Inventor: Yaxin Zhang , Shen Qiao , Shixiong Liang , Ziqiang Yang , Zhihong Feng
- Applicant: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA
- Applicant Address: CN Chengdu
- Assignee: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA
- Current Assignee: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA
- Current Assignee Address: CN Chengdu
- Agent Gokalp Bayramoglu
- Priority: CN201310187521 20130520; CN201310198600 20130524
- International Application: PCT/CN2014/000512 WO 20140520
- International Announcement: WO2014/187150 WO 20141127
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H04B10/516 ; H04B10/90 ; H04B10/50

Abstract:
Terahertz external modulator based on high electron mobility transistors belongs to the field of electromagnetic functional devices technology. This invention includes the semiconductor substrate (1), the epitaxial layer (2), and the modulation-unit array (4). The epitaxial layer (2) is set on the semiconductor substrate (1). The modulation-unit (4), the positive electrode (3), and the negative electrode (5) are all set on the epitaxial layer (2). The modulation-unit array includes at least three units with each of them is composed of high electron mobility transistors and metamaterial-structure. The gates of transistors connect to the negative electrode (5), and the sources and drains connect to the positive electrode (3). This invention is used for manipulation of spatial transmission terahertz waves. It could be operated at room temperatures, normal pressures, and non-vacuum condition. It does not need to load on the waveguide, thus is easy to package and use.
Public/Granted literature
- US20160233962A1 HIGH ELECTRON MOBILITY TRANSISTOR-BASED TERAHERTZ WAVE SPACE EXTERNAL MODULATOR Public/Granted day:2016-08-11
Information query
IPC分类: