Invention Grant
US09578730B2 Extreme ultraviolet light generation apparatus and extreme ultraviolet light generation system 有权
极紫外光发生装置和极紫外光发生系统

Extreme ultraviolet light generation apparatus and extreme ultraviolet light generation system
Abstract:
An extreme ultraviolet light generation apparatus may include: a chamber; a target generation unit configured to output a target to a predetermined region inside the chamber; a focusing optical system configured to concentrate a pulse laser beam to the predetermined region; and a plurality of scattered light detectors each configured to detect scattered light from the target irradiated with the pulse laser beam. The extreme ultraviolet light generation apparatus may further include: an optical path changer configured to change an optical path of the pulse laser beam; and an optical path controller configured to control the optical path changer on a basis of results of detection by the plurality of scattered light detectors.
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