发明授权
- 专利标题: Formation of SiGe nanotubes
- 专利标题(中): SiGe纳米管的形成
-
申请号: US14847619申请日: 2015-09-08
-
公开(公告)号: US09570299B1公开(公告)日: 2017-02-14
- 发明人: Kangguo Cheng , Hong He , Ali Khakifirooz , Juntao Li
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Michael J. Chang, LLC
- 代理商 Vazken Alexanian
- 主分类号: H01L21/02
- IPC分类号: H01L21/02 ; H01L21/306 ; H01L21/324 ; H01L29/06 ; H01L29/161 ; G01N33/00 ; B82Y15/00 ; B82Y40/00
摘要:
Techniques for forming nanostructured materials are provided. In one aspect of the invention, a method for forming nanotubes on a buried insulator includes the steps of: forming one or more fins in a SOI layer of an SOI wafer, wherein the SOI wafer has a substrate separated from the SOI layer by the buried insulator; forming a SiGe layer on the fins; annealing the SiGe layer under conditions sufficient to drive-in Ge from the SiGe layer into the fins and form a SiGe shell completely surrounding each of the fins; and removing the fins selective to the SiGe shell, wherein the SiGe shell which remains forms the nanotubes on the buried insulator. A nanotube structure and method of forming a nanotube device are also provided.
公开/授权文献
- US20170069492A1 Formation of SiGe Nanotubes 公开/授权日:2017-03-09
信息查询
IPC分类: