发明授权
- 专利标题: Integrated time dependent dielectric breakdown reliability testing
- 专利标题(中): 集成时间依赖介质击穿可靠性测试
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申请号: US13530782申请日: 2012-06-22
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公开(公告)号: US09557369B2公开(公告)日: 2017-01-31
- 发明人: Jifeng Chen , Dirk Pfeiffer , Thomas M. Shaw , Peilin Song , Franco Stellari
- 申请人: Jifeng Chen , Dirk Pfeiffer , Thomas M. Shaw , Peilin Song , Franco Stellari
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 代理机构: Tutunjian & Bitetto, P.C.
- 代理商 Daniel P. Morris
- 主分类号: G01R31/28
- IPC分类号: G01R31/28 ; G01R31/311
摘要:
Methods for reliability testing include applying a stress voltage to a device under test (DUT); measuring a leakage current across the DUT; triggering measurement of optical emissions from the DUT based on the timing of the measurement of the leakage current; and correlating measurements of the leakage current with measurements of the optical emissions to determine a time and location of a defect occurrence within the DUT by locating instances of increased noise in the leakage current that correspond in time with instances of increased optical emissions.
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