The present invention relates to a method of generating oxygen. The method addresses the objects of reducing the servicing work and improving the purity of the generated oxygen. According to the invention, the method comprises the steps of: providing an oxygen comprising gas at a primary side of a dense voltage drivable membrane (12); applying a voltage between a conductive element at the primary side of the membrane (12) and a conductive element at a secondary side of the membrane (12), the conductive elements being electrically connected to the membrane (12), wherein a plasma (18, 20) is generated at at least one of the primary side and the secondary side of the membrane (12), the plasma (18, 20) being used as conductive element.