发明授权
US09530682B2 System and apparatus for holding a substrate over wide temperature range
有权
用于在宽温度范围内保持基板的系统和装置
- 专利标题： System and apparatus for holding a substrate over wide temperature range
- 专利标题（中）： 用于在宽温度范围内保持基板的系统和装置
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申请号： US14275779申请日： 2014-05-12
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公开(公告)号： US09530682B2公开(公告)日： 2016-12-27
- 发明人: Roger B. Fish , W. Davis Lee
- 申请人： Varian Semiconductor Equipment Associates, Inc.
- 申请人地址： US MA Gloucester
- 专利权人： Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人： Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人地址： US MA Gloucester
- 主分类号： H01L21/683
- IPC分类号： H01L21/683 ; H01T23/00 ; H01L21/687 ; H01L21/67
摘要：
An apparatus to support a substrate may include a base, a clamp portion to apply a clamping voltage to the substrate, and a displacement assembly configured to hold the clamp portion and base together in a first operating position, and to move the clamp portion with respect to the base from the first operating position to a second operating position, wherein the clamp portion and base are separate from one another in the second operating position.
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