Invention Grant
US09526146B2 Mask assembly fabrication apparatus and mask assembly fabrication method using the same
有权
面罩组装制造装置及使用其的面罩组装制造方法
- Patent Title: Mask assembly fabrication apparatus and mask assembly fabrication method using the same
- Patent Title (中): 面罩组装制造装置及使用其的面罩组装制造方法
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Application No.: US14034901Application Date: 2013-09-24
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Publication No.: US09526146B2Publication Date: 2016-12-20
- Inventor: Hee-Seak Noh
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: KR10-2013-0043648 20130419
- Main IPC: B23P19/04
- IPC: B23P19/04 ; H05B33/10
Abstract:
A mask assembly fabrication apparatus includes a first vibration proof apparatus formed on a base surface, a first surface plate formed on the first vibration proof apparatus, stages formed on the first surface plate, a mask frame placed on the stages, a second vibration proof apparatus formed on the base surface to be separate from the first vibration proof apparatus, a second surface plate formed on the second vibration proof apparatus to be separate from the first surface plate, and a driving unit formed on the second surface plate and configured to move a mask.
Public/Granted literature
- US20140310939A1 MASK ASSEMBLY FABRICATION APPARATUS AND MASK ASSEMBLY FABRICATION METHOD USING THE SAME Public/Granted day:2014-10-23
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