Invention Grant
- Patent Title: Vertical memory devices
- Patent Title (中): 垂直存储器件
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Application No.: US14988178Application Date: 2016-01-05
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Publication No.: US09524983B2Publication Date: 2016-12-20
- Inventor: Byung-Jin Lee , Jee-Yong Kim , Dae-Seok Byeon
- Applicant: Byung-Jin Lee , Jee-Yong Kim , Dae-Seok Byeon
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2015-0033070 20150310; KR10-2015-0067286 20150514
- Main IPC: H01L27/115
- IPC: H01L27/115

Abstract:
A vertical memory device includes a substrate, gate lines, channels, contacts and contact spacers. The gate lines are stacked on top of each other on the substrate. The gate lines are spaced apart from each other in a vertical direction with respect to a top surface of the substrate. The gate lines include step portions that extend in a parallel direction with respect to the top surface of the substrate. The channels extend through the gate lines in the vertical direction. The contacts are on the step portions of the gate lines. The contact spacers are selectively formed along sidewalls of a portion of the contacts.
Public/Granted literature
- US20160268301A1 VERTICAL MEMORY DEVICES Public/Granted day:2016-09-15
Information query
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